Dry Vacuum Pumps Market

How big is Dry Vacuum Pumps Market in 2026?

The global dry vacuum pumps market is valued at USD 3.21 billion in 2026 and is projected to reach USD 6.31 billion by 2036, expanding at a CAGR of 7.0% during the forecast period.

Market growth is supported by increasing demand for oil-free vacuum technologies across semiconductor manufacturing and industrial processing applications. By product type, dry screw vacuum pumps are expected to account for 40.0% of the market in 2026, while medium-capacity pumps are projected to lead the capacity segment with a 50.0% share. New process capacity and replacement within installed vacuum systems sustain equipment demand. Technical development concerns both the pump and its surrounding installation: Xi'an Jiaotong University's 2026 dry-screw study validates a rotor-geometry model, while CERN's May 2025 vacuum programme coordinates pumping units with gauges, valves, controls and installation work. [1][2] CERN's programme illustrates wider vacuum procurement. NIST's June 2025 optical-pressure research adds measurement context for process assessment. [3] Together, these records show why gas load, pressure range and control interfaces shape the equipment specification; the geometric study remains a design investigation rather than a measured industrial efficiency result.

The UK has the highest projected country CAGR at 10.8% for 2026 to 2036, ahead of Germany at 6.4%, the USA at 6.2% and Japan at 5.5%. The UK's June 2025 industrial strategy identifies semiconductor activity in South Wales, providing an industrial setting for process-equipment demand. [4]

Agilent Technologies, Atlas Copco AB, Ebara Corporation, Pfeiffer Vacuum GmbH and ULVAC are representative suppliers in the coverage. Competition turns on the ability to serve a defined pressure and gas-load duty with suitable controls, qualification support and maintenance access. Replacement customers also face existing interfaces and limited production windows. Offers that specify the pump configuration, associated equipment and service responsibilities allow customers to assess installation effort and interruption costs alongside purchase price, making system support a practical source of differentiation.

Key Market Trends & Insights

• Rotor geometry research remains distinct from measured whole-pump performance in an industrial process. [1]
• Vacuum procurement can combine pumps, gauges, valves and controls in a coordinated installation. [2]
• Pressure measurement and semiconductor investment provide relevant technical and demand contexts without measuring dry-pump revenue. [3][4]

Regional Highlights

• The UK is the fastest of the four projected country profiles, at 10.8% for the 2026 to 2036 forecast period.
• Germany, the USA and Japan are profiled at 6.4%, 6.2% and 5.5% respectively for 2026 to 2036.
• The UK’s June 2025 industrial strategy identifies semiconductor activity in Wales; that policy context is separate from an equipment order. [4]

Market Size & Forecast

Table 1: Market Size and Forecast for Dry Vacuum Pumps Market (USD billion and percentage), 2025 to 2036

Metric	Value
Published market value (2025)	USD 3.0 billion
Projected reference value (2026)	USD 3.21 billion
Reference forecast value (2035)	USD 5.9 billion
Extended projection (2036)	USD 6.31 billion
Forecast CAGR, 2026 to 2036	7.0%

The market is projected at USD 6.31 billion in 2036, compared with USD 3.21 billion in 2026, with a forecast CAGR of 7.0%. The 2035 reference forecast is USD 5.9 billion. Demand can arise from new process capacity or from replacement equipment within an established vacuum system. A replacement must fit the gas duty and installation interfaces already in use; a new project can assess a wider equipment combination. In both cases, service access and the cost of a production interruption affect the ownership comparison.

The dry vacuum pump shares provides related supplier coverage for the equipment category.

The pump is one part of the vacuum arrangement

A vacuum installation needs a pressure duty, a gas-load specification and a way to monitor whether operation remains within those conditions. CERN’s May 2025 vacuum programme lists pumps alongside gauges, electrical boxes, valves and installation activities. [2] It supplies a concrete example of coordinated procurement, although the listed pumps are not all identified as dry types. The purchasing implication is to define the complete system boundary before comparing equipment prices. A customer also needs to know which operating and maintenance responsibilities remain with its own team. Research on rotor geometry can inform future designs, but a geometric prototype does not establish industrial performance or reliability for another pump.

Table 2: Industry evidence relevant to the dry vacuum pumps market

Indicator	Data point or observation	Market relevance	Source
Rotor geometry	Xi’an Jiaotong University recorded a 2026 intersecting-axis dry screw design study.	Geometry validation and measured operational performance are separate stages.	[1]
System procurement	CERN’s May 2025 plan combines pumping equipment with controls, gauges and installation.	A complete offer needs explicit interfaces and responsibilities.	[2]
Measurement research	NIST reported optical pressure-measurement research in June 2025.	Credible pressure assessment remains part of process control and qualification.	[3]

Analyst Perspective

“The useful comparison is the cost of maintaining the required vacuum duty across the customer’s process cycle. Pump configuration, controls, gas handling and the response to a service fault belong in that assessment. A nominal pumping-speed figure is only one input to the equipment decision.”

- Nikhil Kaitwade, Future Market Insights

How is the Dry Vacuum Pumps Market segmented?

The market is segmented by Product Type, Capacity, and Region.

Product type describes the pump mechanism, while capacity describes a separate market grouping. Dry screw pumps lead the projected product benchmark, and medium capacity pumps lead the projected capacity benchmark, both in 2026. A customer’s selection still depends on pressure, gas load and the wider installation. The system may also need gauges, valves and controls, each with a defined interface to the pump. That complete arrangement determines how the equipment will be commissioned, assessed and maintained in the intended process.

Why do Dry Screw Vacuum Pumps account for 40.0% of product type demand in 2026?

Table 3: Product Type Share for Dry Vacuum Pumps Market (percentage share), 2026

Product Type	Projected share (2026)
Dry Screw Vacuum Pumps	40.0%
Other product types	60.0%
Total	100.0%

Table 4: Segment Position and Market Growth for Dry Vacuum Pumps Market, 2026 to 2036

Metric	Value
Global CAGR (2026 to 2036)	7.0%
Profiled product type segment	Dry Screw Vacuum Pumps

Dry screw vacuum pumps hold a projected 40.0% share of product-type demand in 2026. Their relevance to a customer depends on the pressure and gas duty the proposed configuration can serve. Buyers need to compare the complete operating arrangement and maintenance requirements, rather than infer suitability from the mechanism’s name alone. The Xi’an Jiaotong study describes a novel screw geometry and a prototype used to validate its geometric generation model. [1] That work is a research route, not evidence that every commercial screw pump achieves the reported geometric reductions. A supplier can make an equipment offer more useful by identifying the duty conditions and service scope explicitly. Those details also help a customer judge whether a replacement fits the existing system without creating unpriced installation work.

The Dry Screw Vacuum Pumps segment is estimated to account for 40.0% of product type demand in 2026.

• Dry Screw Vacuum Pumps represent a projected 40.0% of product-type demand in 2026; other product types together represent 60.0%.
• The mechanism needs to be assessed against the intended pressure and gas-load duty.

Why do Medium Capacity Pumps account for 50.0% of capacity demand in 2026?

Table 5: Capacity Share for Dry Vacuum Pumps Market (percentage share), 2026

Capacity	Projected share (2026)
Medium Capacity Pumps	50.0%
Other capacity groups	50.0%
Total	100.0%

Medium capacity pumps represent 50.0% of the projected capacity breakdown in 2026. The commercial significance lies in matching a process requirement with the equipment and system support it needs. A buyer should identify the operating cycle, pressure range and gas load before comparing nominal capacity figures. The actual installation can also require controls, measurement equipment and a service arrangement that keeps production interruption manageable. CERN’s 2025 programme illustrates those broader procurement interfaces, although it does not establish a market-wide capacity distribution for dry pumps. [2] Suppliers can explain which accessories and installation tasks accompany the proposed unit, making competing prices easier to compare. The segment share remains a projected 2026 benchmark and does not prescribe the correct pump size for an individual process.

The Medium Capacity Pumps segment is estimated to account for 50.0% of capacity demand in 2026.

• Medium Capacity Pumps account for a projected 50.0% of capacity demand in 2026; other capacity groups together account for 50.0%.
• The operating cycle and required vacuum duty determine whether the proposed capacity is useful.
• The Compressors and Vacuum Pumps Market covers a wider equipment group; its size is distinct from the dry-pump forecast here.

What are the drivers, restraints, and opportunities in the Dry Vacuum Pumps Market?

Process vacuum requirements and replacement needs support demand; qualification and downtime constrain substitution; complete system scope and service support improve the offer.

Driver

Processes that require a defined vacuum create demand for pumps and the equipment around them. New capacity can generate a complete installation order, while existing systems create replacement and service needs. The UK’s June 2025 industrial strategy identifies semiconductor activity and related support in Wales, providing a demand setting rather than a direct dry-pump order count. [4] Customers need equipment appropriate to their actual production or research duty. The commercial driver is the requirement to achieve and maintain those process conditions with manageable interruptions. Suppliers can assess the opportunity more clearly when the customer’s gas load, control arrangement and acceptance criteria are established early.

Restraint

A catalogue specification cannot settle the complete process fit. Operating conditions, system interfaces and maintenance requirements can limit substitution between apparently similar pumps. A geometric design study may point to a promising research route without establishing measured energy use or long-term industrial reliability. [1] Qualification can therefore involve additional work before a customer accepts an alternative. That work has a cost, especially where the pump is part of an established process. Buyers must also account for the consequences of downtime, so a low equipment price can be unattractive if the service response or replacement arrangement is unclear.

Opportunity

A supplier can strengthen the offer by connecting the quoted pump with the controls, measurements and support required at the site. CERN’s programme shows that a vacuum project can contain several coordinated equipment and installation activities. [2] Clear interfaces help the customer compare a complete operating arrangement. Support for qualification and accessible service information can also make a replacement easier to evaluate. NIST’s 2025 pressure research is relevant to the wider measurement setting, but it does not establish a new performance rating for a commercial dry pump. [3] The practical opportunity remains a well-defined, maintainable process installation.

Process facilities also procure equipment with other gas-handling duties. The Industrial Air Filtration Market covers adjacent filtration demand.

Which country CAGRs are profiled in the Dry Vacuum Pumps Market?

Table 6: Country CAGR Comparison for Dry Vacuum Pumps Market (CAGR percentage), 2026 to 2036

Country	CAGR
United Kingdom	10.8%
Germany	6.4%
United States	6.2%
Japan	5.5%

Country-wise Analysis

United Kingdom Dry Vacuum Pumps Market Outlook (2026 to 2036)

The UK’s June 2025 industrial strategy identifies the semiconductor cluster in South Wales and plans for related skills support. [4] This provides an industrial context, not a count of dry vacuum pump orders or proof that every project uses the same technology. Buyers evaluating equipment need to establish the actual process duty and the boundaries between pump supply, installation and continuing support. A new production or research programme may require controls and gauges as well as the pump. The forecast rate remains distinct from an individual investment decision, which depends on qualification, production scheduling and the service arrangements available for the intended site.

Germany Dry Vacuum Pumps Market Outlook (2026 to 2036)

Replacement in an established vacuum installation starts with the process conditions and interfaces already in use. That creates a different comparison from specifying a complete new system. A purchaser needs to establish whether the proposed pump can serve the required gas load and pressure cycle, what changes installation will require and how the equipment will be maintained. Suppliers can improve bids by making those dependencies explicit before price is compared. Pump mechanism and capacity still need to match the gas load and pressure duty of the intended application.

United States Dry Vacuum Pumps Market Outlook (2026 to 2036)

NIST’s June 2025 optical-pressure research places measurement within a wider range of industrial applications, including microchip manufacture and leak detection. [3] It is relevant context for credible process assessment, although it is not a commercial dry-pump performance study. Equipment buyers need to connect the required pressure duty with measurement, controls and support in the proposed installation. A low acquisition price can leave significant operating work outside the offer if those interfaces are not defined. The market rate describes the national value outlook over the 2026 to 2036 forecast period and does not imply a uniform growth rate across every process, pump design or customer investment programme.

Japan Dry Vacuum Pumps Market Outlook (2026 to 2036)

For an operating process, the commercial value of a replacement depends on achieving the required duty without an unacceptable interruption. Customers need to understand service access, the availability of a replacement unit and any changes to controls or installation connections. A new project can consider a broader equipment combination, but it still needs a defined gas load and acceptance basis. Suppliers can make their offer more useful by explaining these responsibilities in the same quotation as the pump. A replacement proposal needs an operating basis for process performance and service, alongside the commercial terms for the equipment.

Who are the notable companies in the Dry Vacuum Pumps Market?

Agilent Technologies; Atlas Copco AB; Ebara Corporation; Pfeiffer Vacuum GmbH; ULVAC

Agilent, Atlas Copco, Ebara, Pfeiffer Vacuum and ULVAC are representative names in the market coverage. The buyer’s comparison should address an equivalent operating duty and the work included in each offer. Pump supply, measurement equipment and a complete vacuum arrangement can leave different responsibilities with the customer. Making those boundaries explicit helps purchasing and process teams assess qualification effort, service availability and the cost of an interruption alongside the unit price.

Competitive Benchmarking: Dry Vacuum Pumps Market

Table 7: Competitive positioning for the dry vacuum pumps market

Company	Positioning	Buyer comparison focus
Agilent Technologies	Vacuum equipment participant	Compare the stated duty and the measurement or control interfaces.
Atlas Copco AB	Vacuum equipment participant	Clarify pump configuration and continuing service support.
Ebara Corporation	Vacuum equipment participant	Assess gas-duty compatibility and the complete installation scope.
Pfeiffer Vacuum GmbH	Vacuum equipment participant	Identify qualification, controls and replacement responsibilities.
ULVAC	Vacuum equipment participant	Compare the proposed system boundary and maintenance arrangement.

Key Developments in the Dry Vacuum Pumps Market

• CERN’s May 2025 programme combines pumping-unit procurement with controls and installation activities. [2]
• NIST reported optical pressure-measurement research in June 2025. [3]
• The university recorded the novel dry-screw rotor study in March 2026. [1]

Key Players in the Dry Vacuum Pumps Market

Vacuum equipment participant

• Agilent Technologies
• Atlas Copco AB
• Ebara Corporation
• Pfeiffer Vacuum GmbH
• ULVAC

Dry Vacuum Pumps Market Report Scope

Table 8: Report Scope for Dry Vacuum Pumps Market, 2026 to 2036

Coverage field	Report scope
Market definition	Dry vacuum pumps across the published product-type and capacity categories.
Quantitative units	USD billion and percentage
Forecast period	2026 to 2036
Segment reference period	2026
Market breakdown	Product Type; Capacity
Profiled geographies	United Kingdom; Germany; United States; Japan
Representative companies	Agilent Technologies; Atlas Copco AB; Ebara Corporation; Pfeiffer Vacuum GmbH; ULVAC

Dry Vacuum Pumps Market Research Methodology

Table 9: Research Methodology for Dry Vacuum Pumps Market, 2026 edition

Method	Approach
Published baseline	The published 2025 market baseline is USD 3.0 billion; the 2035 reference forecast is USD 5.9 billion.
Extended outlook	The market outlook covers 2026 to 2036 with a forecast CAGR of 7.0%.
Segment benchmarks	Product-type and capacity shares are projected for 2026.
Country profiles	Four country CAGR forecasts cover 2026 to 2036.
Technical evidence	Research on geometry and pressure measurement keeps its original scope.
Project evidence	CERN’s programme illustrates system procurement; it does not identify all listed pumps as dry types.

Dry Vacuum Pumps Market by Segments

Dry Vacuum Pumps Market segmented by Product Type:

• Dry Screw Vacuum Pump
• Dry Scroll Vacuum Pump
• Dry Diaphragm Pump
• Dry Claw and Hook Pumps
• Others

Dry Vacuum Pumps Market segmented by Capacity:

• Low Capacity (Up to 100 m³/h)
• Medium Capacity (100-500 m³/h)
• High Capacity (More than 500 m³/h)

Dry Vacuum Pumps Market by Region

• North America
  • United States
  • Canada
  • Mexico
• Latin America
  • Brazil
  • Argentina
• Western Europe
  • Germany
  • France
  • United Kingdom
  • Italy
  • Spain
• Eastern Europe
  • Poland
  • Czech Republic
  • Romania
• East Asia
  • China
  • Japan
  • South Korea
• South Asia and Pacific
  • India
  • ASEAN
  • Australia
  • New Zealand
• Middle East and Africa
  • Saudi Arabia
  • United Arab Emirates
  • South Africa

Research Sources and Bibliography

• [1] Xi’an Jiaotong University. 3 March 2026 publication record. Design of a novel intersecting-axis meshing Quimby-tooth dry screw vacuum pump
• [2] CERN. 12 May 2025. NACONS WP3.3.2 Vacuum — programme review and 2025 plan
• [3] US National Institute of Standards and Technology. 26 June 2025. Research Under Pressure: NIST Scientists Make Definitive Measurement of the Optical Pascal
• [4] UK Wales Office and Department for Business and Trade. 23 June 2025. Industrial Strategy to boost growth and jobs in Wales

This Report Answers

• What is the 2026 reference projection?
• What is the extended 2036 outlook?
• Which product share is retained?
• What is the capacity benchmark?
• Which country has the highest projected growth rate?
• Which periods apply to country and segment benchmarks?